INTRODUCTION/產(chǎn)品介紹

he ARC maglev-pump system is a revolutionary centrifugal pump that has no bearings to wear out or sealsto break down and fail. Based on the principles of magnetic levitation, the pump's impeller is suspendedcontact-free, inside a sealed casing and is driven by the magnetic field ofthe motor. The impeller and casingare both fabricated from chemical-resistant high purity fluorocarbon resins. Together with the rotor magnetthey make up the pump head. Fluid flow rate and pressure are precisely controlled by electronicallyregulating the impeller speed without pulsation. Closed loop flow or pressure control is easy configurablewith the usage of an additional pressure or flow sensor.

ARC系列磁懸浮泵系統(tǒng)是一種革命性的離心泵，它沒有軸承磨損或密封件故障。根據(jù)磁懸浮原理，泵的葉輪無接觸地懸浮在密封外殼內(nèi)，由電機(jī)磁場驅(qū)動(dòng)旋轉(zhuǎn)。葉輪和殼體均由耐化學(xué)腐蝕的高純度氟樹脂制成。它們與轉(zhuǎn)子磁鐵一起構(gòu)成泵頭。流體流量和壓力可以通過電子調(diào)速器連續(xù)調(diào)節(jié)葉輪速度進(jìn)行精確控制確保沒有脈動(dòng)。通過使用額外的壓力或流量傳感器，可以輕松配置閉環(huán)流量或壓力控制。隨著技術(shù)和應(yīng)用的成熟，磁懸浮泵已經(jīng)被廣泛用于半導(dǎo)體制造的多個(gè)過程，例如電子化學(xué)液體輸送、光化學(xué)處理、硅片刻蝕、硅片清洗,金屬鍍層和CMP藥液輸送等場景。